关于半导体设备的endeffector介绍

PRODUCT DESCRIPTION

NoTouch End Effectors

Flexible Integration Components

Tru-Si’s NoTouch robotic end effectors enable automatic handling of flexible ultra thin to rigid full thickness wafers without touching or damaging them. Silicon, GaAs, InP, and other similar material can all be handled using the same end effector. Even extremely uneven surfaces, such as bumped or dirty wafers, are no problem for NoTouch end effectors.

The unique, universal design ofTru-Si’send

effectorallows it to work with both cassettes and a variety of wafer stacking pods from multiple vendors. Sensors are available for automatic detection of wafers in a cassette, cross slotted wafers, wafers in a pod, separators in a pod, and foam in a pod.

Wafers are levitated using multiple gas vortices to provide an evenly distributed lifting force that picks up and holds the wafer flat. Each of the gas vortices produces a mini tornado that creates a low pressure above the wafer. But since air is being blown out of the vortices, the wafer is

suspended inequilibrium between the blowing air and the low pressure lifting force.

Gas vortices are distributed evenly over the surface of the endeffectorto apply a uniform holding force over the entire surface of the wafer thus minimizing stress to thin fragile wafers. This distribution also insures that bowed wafers are flattened as they are picked up and then held flat suspended beneath the surface of the end effector.

Small brakes made of peak plastic, the same material used in the manufacture of cassettes, are used to keep the wafer from sliding off or

rotating on the end effector. The peak brakes are mounted front and back and only touch the edge of the wafer.

Front side protection of devices or bumps is unnecessary since no physical contact is made between the wafer andNoTouch endeffector. Holding gas can be compressed air (CDA), dry nitrogen, or any other inert gas. If the gas is from a compressed source, wafers will be held in place during a power loss.

Tru-Si’s NoTouch robotic end effectors are available in 100mm, 125mm, 150mm, 200mm

and 300 mm sizes.